The thesis focuses on improving the flowrate of the Knudsen gas pump. The Knudsen pump uses thermal transpiration as the driving mechanism to pump gas. It is a motionless gas pump as the pump does not require any moving actuators for pumping. The...
Integrated circuits--Design and construction; Integrated circuits industry--Technological innovations
Lithographic processes for printing device structures on integrated circuits plays a major role in the semiconductor industry. This project aims at designing and fabricating a programmable mask for a direct write lithography system which can...
