In the electronic and microfabrication industry, die separation is one of the most critical steps in producing an undamaged, stand-alone micro-scale device. For silicon based devices, it is the predominant step governing resistance to die failure...
Integrated circuits--Design and construction; Integrated circuits industry--Technological innovations
Lithographic processes for printing device structures on integrated circuits plays a major role in the semiconductor industry. This project aims at designing and fabricating a programmable mask for a direct write lithography system which can...
Over the last 15 years, researchers have explored the use of piezoresistive microcantilevers/resonators as gas sensors because of their relative ease in fabrication, low production cost, and their ability to detect changes in mass or surface stress...