This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar...
The Knudsen pump works on the principle of thermal transpiration. As a result of requiring a thermal gradient, channel hydraulic diameter smaller than the mean free path of the gas being pumped, and having no moving parts, the Knudsen pump features...
Bi-stable buckled MEMS (micro-electromechanical systems) diaphragms have a myriad of uses in the MEMS field for their large out-of-plane deflections. Buckling is a phenomenon brought upon by a compressive stress. Diaphragms are large aspect ratio,...
Over the last 15 years, researchers have explored the use of piezoresistive microcantilevers/resonators as gas sensors because of their relative ease in fabrication, low production cost, and their ability to detect changes in mass or surface stress...
In July 1995, National Science Foundation Award # 9551869 funded the development of a new inter-disciplinary microfabrication course under the primary leadership of Dr. Kevin Walsh at the University of Louisville. Along with this award, the...
Protective coatings; Microelectromechanical systems
PARYLENE (poly-para-xylylene) is mostly used as a conformal protective polymer pin-hole free coating material to uniformly protect any component configuration on diverse substrates. This thesis describes in detail how the unique properties of...
Lead Zirconate Titanate (PZT), known for its ferroelectric properties, is widely used in micro-electromechanical (MEMS) and nano-electromechanical (NEMS) devices. PZT is a ceramic material that is most commonly found in its sol gel form, which...
