Bi-stable buckled MEMS (micro-electromechanical systems) diaphragms have a myriad of uses in the MEMS field for their large out-of-plane deflections. Buckling is a phenomenon brought upon by a compressive stress. Diaphragms are large aspect ratio,...
In July 1995, National Science Foundation Award # 9551869 funded the development of a new inter-disciplinary microfabrication course under the primary leadership of Dr. Kevin Walsh at the University of Louisville. Along with this award, the...