Over the last 15 years, researchers have explored the use of piezoresistive microcantilevers/resonators as gas sensors because of their relative ease in fabrication, low production cost, and their ability to detect changes in mass or surface stress...
Symmetric piezoresistive microcantilever beams have been demonstrated in previous research to be capable of sensing the presence of surrounding gas. This occurs as the damping effect of the gas changes the beam resonance behavior. Device...