Most of the structures in submillimeter-scale engineering are created from thin films, making them essentially two-dimensional (2D). Significant work has been done to fabricate 3D structures using self-folding, a deterministic form of...
Over the last 15 years, researchers have explored the use of piezoresistive microcantilevers/resonators as gas sensors because of their relative ease in fabrication, low production cost, and their ability to detect changes in mass or surface stress...