Protective coatings; Microelectromechanical systems
PARYLENE (poly-para-xylylene) is mostly used as a conformal protective polymer pin-hole free coating material to uniformly protect any component configuration on diverse substrates. This thesis describes in detail how the unique properties of...
Integrated circuits--Design and construction; Integrated circuits industry--Technological innovations
Lithographic processes for printing device structures on integrated circuits plays a major role in the semiconductor industry. This project aims at designing and fabricating a programmable mask for a direct write lithography system which can...
Symmetric piezoresistive microcantilever beams have been demonstrated in previous research to be capable of sensing the presence of surrounding gas. This occurs as the damping effect of the gas changes the beam resonance behavior. Device...
Over the last 15 years, researchers have explored the use of piezoresistive microcantilevers/resonators as gas sensors because of their relative ease in fabrication, low production cost, and their ability to detect changes in mass or surface stress...
Bi-stable buckled MEMS (micro-electromechanical systems) diaphragms have a myriad of uses in the MEMS field for their large out-of-plane deflections. Buckling is a phenomenon brought upon by a compressive stress. Diaphragms are large aspect ratio,...
