This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar...
The Knudsen pump works on the principle of thermal transpiration. As a result of requiring a thermal gradient, channel hydraulic diameter smaller than the mean free path of the gas being pumped, and having no moving parts, the Knudsen pump features...
Bi-stable buckled MEMS (micro-electromechanical systems) diaphragms have a myriad of uses in the MEMS field for their large out-of-plane deflections. Buckling is a phenomenon brought upon by a compressive stress. Diaphragms are large aspect ratio,...
