Microhotplates for metal oxide gas sensors are fabricated using platinum microheaters and tested. Power consumption is monitored and temperature distributions are observed using infrared microscopy. Temperature line traces are extracted from the...
This thesis is based on work done as part of a bigger project supported by Naval Research Laboratories (NRL). A MOSIS fabricated micro hotplate is simulated using the CAD software CoventorWare. There are three different sized hotplates in one die;...