Integrated circuits--Design and construction; Integrated circuits industry--Technological innovations
Lithographic processes for printing device structures on integrated circuits plays a major role in the semiconductor industry. This project aims at designing and fabricating a programmable mask for a direct write lithography system which can...
The thesis focuses on improving the flowrate of the Knudsen gas pump. The Knudsen pump uses thermal transpiration as the driving mechanism to pump gas. It is a motionless gas pump as the pump does not require any moving actuators for pumping. The...
This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar...
