This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar...
In July 1995, National Science Foundation Award # 9551869 funded the development of a new inter-disciplinary microfabrication course under the primary leadership of Dr. Kevin Walsh at the University of Louisville. Along with this award, the...
Protective coatings; Microelectromechanical systems
PARYLENE (poly-para-xylylene) is mostly used as a conformal protective polymer pin-hole free coating material to uniformly protect any component configuration on diverse substrates. This thesis describes in detail how the unique properties of...