In July 1995, National Science Foundation Award # 9551869 funded the development of a new inter-disciplinary microfabrication course under the primary leadership of Dr. Kevin Walsh at the University of Louisville. Along with this award, the...
Protective coatings; Microelectromechanical systems
PARYLENE (poly-para-xylylene) is mostly used as a conformal protective polymer pin-hole free coating material to uniformly protect any component configuration on diverse substrates. This thesis describes in detail how the unique properties of...
This dissertation demonstrates an elegant method, known as 'micro-origami' or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar...